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【書報討論】105/5/12 國立成功大學機械工程學系 屈子正副教授

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日期/時間:2016-5-12(四) 3:30PM~5:00PM

地點:清華大學工程一館107演講廳

演講題目:應用破壞力學於微電子結構脫層分析

演講者: 國立成功大學機械工程學系 屈子正副教授

演講大綱:

Interface delamination is a widely observed failure mode in microelectronic components involving thin films and layered structures. In this presentation, the application of fracture mechanics in studying the delamination problem will be discussed. A brief review of fracture mechanics fundamentals and the typical delamination failures will first be given. A novel experimental approach for characterizing the critical and subcritical parameters for the interface resistance against delamination will then be described; Application of numerical procedures on the fatigue growth of interface delamination in microelectronic components will be also covered.
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